Semiconductor Process Tool Illumination

Illuminating the inside of a surface preparation system or other semiconductor process tool can be challenging.

The light fixtures must not disrupt the laminar flow of air through the system, and spatial constraints can severely limit light fixture placement options. Specific colors of light, including white light, can have a negative impact on system processes. Additionally, these fixtures could be exposed to harsh and damaging chemicals as well as vapors capable of scaring and corroding surfaces.


Sealing light fixtures into special protective enclosures that do not disrupt airflow add time and expense to installation and can complicate routine maintenance. Often, lights are installed merely into the corners of a process tool where they will not disrupt airflow and where space is less of a concern. The deployed in these locations may not illuminate the work area properly.

YOUR BENEFITS

  • Brilliant, yellow,  even Illumination on a compact area.
  • LED light is redundantly sealed, is IEC IP66, IP67 and IP69K rated.
  • Cost effective because of the maintenance-free illumination of 50,000 hours or more lifespan.

  • Banner’s WLS27 Rugged LED Strip Lights Provide Work Area With Clear, Bright Yellow Light

  • Banner's LED Strip Lights for Harsh Environments Are Enclosed in a Shatterproof Shell

The solution for this application are Banner Engineering’s WLS27 rugged LED strip lights, specially developed to provide brilliant, even illumination in challenging environments and compact spaces. They have a space-saving, aerodynamic design, are fully encapsulated in a protective shell, and come in a broad range of illumination color options. Machine designers can install WLS27 LED strip lights wherever they are best suited to illuminate a work area without making costly or time-consuming modifications to the lights.

Inside the process tool, multiple 430 mm LED strip lights are installed directly over the work area, filling the space with bright, yellow light, appropriate for use during photolithographic processes. Each light is suspended approximately 250 mm from the ceiling of the tool, directly in the flow of air, without disrupting the laminar flow of air required in this clean space.

Each LED strip light is fully encased in a shatterproof polycarbonate shell which is redundantly sealed, and is IEC IP66, IP67 and IP69K rated. Polycarbonate brackets used in this application ensure that the entire installation is thoroughly protected from any scaring or corrosive damage caused by chemicals or vapors. These cost-effective LED light strips will provide bright, maintenance-free illumination throughout their 50,000 hours or more lifespan.